THE EFFECTS OF H-2-O-2-PLASMA TREATMENT ON THE CHARACTERISTICS OF POLYSILICON THIN-FILM TRANSISTORS
| dc.citation.epage | 2306 | en_US |
| dc.citation.issue | 12 | en_US |
| dc.citation.spage | 2301 | en_US |
| dc.citation.volume | 40 | en_US |
| dc.citation.woscount | 22 | |
| dc.contributor.author | CHERN, HN | en_US |
| dc.contributor.author | LEE, CL | en_US |
| dc.contributor.author | LEI, TF | en_US |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | 奈米中心 | zh_TW |
| dc.contributor.department | 次微米人才培訓中心 | zh_TW |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.contributor.department | Nano Facility Center | en_US |
| dc.contributor.department | CTR SUBMICRON PROFESS TRAINING | en_US |
| dc.date.accessioned | 2014-12-08T15:04:15Z | |
| dc.date.available | 2014-12-08T15:04:15Z | |
| dc.date.issued | 1993-12-01 | en_US |
| dc.description.abstract | The effects of H-2-plasma followed by O-2-plasma treatment on n-channel polysilicon TFT's were investigated. It was found that the H-2-O-2-plasma treatment is more effective in passivating the trap states of polysilicon films than do the H-2-plasma treatment only or the O-2-plasma treatment only. Hence, it is more effective in improving the device performance on the subthreshold swing, carrier mobility and the current ON/OFF ratio. It is also found that thermal annealing on plasma-treated devices increases the deep states but has no effect on the tail states of the devices. | en_US |
| dc.identifier.doi | 10.1109/16.249479 | en_US |
| dc.identifier.issn | 0018-9383 | en_US |
| dc.identifier.journal | IEEE TRANSACTIONS ON ELECTRON DEVICES | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1109/16.249479 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/2751 | |
| dc.identifier.wosnumber | WOS:A1993MP36300021 | |
| dc.language.iso | en_US | en_US |
| dc.title | THE EFFECTS OF H-2-O-2-PLASMA TREATMENT ON THE CHARACTERISTICS OF POLYSILICON THIN-FILM TRANSISTORS | en_US |
| dc.type | Article | en_US |