A PRECISION ALIGNMENT WITH MOIRE TECHNIQUE AND DIFFERENTIAL-AMPLIFIER
| dc.citation.epage | 1941 | en_US |
| dc.citation.issue | 6A | en_US |
| dc.citation.spage | 1940 | en_US |
| dc.citation.volume | 31 | en_US |
| dc.citation.woscount | 0 | |
| dc.contributor.author | CHANG, TC | en_US |
| dc.contributor.author | WU, CW | en_US |
| dc.contributor.author | CHOU, C | en_US |
| dc.contributor.department | 光電工程學系 | zh_TW |
| dc.contributor.department | Department of Photonics | en_US |
| dc.date.accessioned | 2014-12-08T15:04:54Z | |
| dc.date.available | 2014-12-08T15:04:54Z | |
| dc.date.issued | 1992-06-01 | en_US |
| dc.description.abstract | A precision alignment technique is developed. We combined a moire and a differential amplifier to align two Ronchi rulings with high accuracy. The precision of this technique can reach submicron level if higher spatial frequency of the ruling is used. | en_US |
| dc.identifier.doi | 10.1143/JJAP.31.1940 | en_US |
| dc.identifier.issn | 0021-4922 | en_US |
| dc.identifier.journal | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1143/JJAP.31.1940 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/3410 | |
| dc.identifier.wosnumber | WOS:A1992JH48300053 | |
| dc.language.iso | en_US | en_US |
| dc.subject | MOIRE FRINGES | en_US |
| dc.subject | RONCHI RULING | en_US |
| dc.title | A PRECISION ALIGNMENT WITH MOIRE TECHNIQUE AND DIFFERENTIAL-AMPLIFIER | en_US |
| dc.type | Note | en_US |