PVD HfO2 for high-precision MIM capacitor applications
| dc.citation.epage | 389 | en_US |
| dc.citation.issue | 6 | en_US |
| dc.citation.spage | 387 | en_US |
| dc.citation.volume | 24 | en_US |
| dc.citation.woscount | 43 | |
| dc.contributor.author | Kim, SJ | en_US |
| dc.contributor.author | Cho, BJ | en_US |
| dc.contributor.author | Li, MF | en_US |
| dc.contributor.author | Yu, XF | en_US |
| dc.contributor.author | Zhu, CX | en_US |
| dc.contributor.author | Chin, A | en_US |
| dc.contributor.author | Kwong, DL | en_US |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.date.accessioned | 2014-12-08T15:40:49Z | |
| dc.date.available | 2014-12-08T15:40:49Z | |
| dc.date.issued | 2003-06-01 | en_US |
| dc.description.abstract | Metal-insulator-metal (MIM) capacitors are fabricated using sputtered HfO2 with Ta and TaN for top and bottom electrodes, respectively. High-capacitance densities from 4.7 to 8.1 fF/mum(2) have been achieved while maintaining the leakage current densities around 1 x 10(-8) A/cm(2) within the normal circuit bias conditions. A guideline for the insulator thickness and its dielectric constant has been obtained by analyzing the tradeoff between the linearity coefficient and the capacitance density. | en_US |
| dc.identifier.doi | 10.1109/LED.2003.813381 | en_US |
| dc.identifier.issn | 0741-3106 | en_US |
| dc.identifier.journal | IEEE ELECTRON DEVICE LETTERS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1109/LED.2003.813381 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/27826 | |
| dc.identifier.wosnumber | WOS:000184254700007 | |
| dc.language.iso | en_US | en_US |
| dc.subject | capacitance density | en_US |
| dc.subject | HfO2 | en_US |
| dc.subject | metal-insulator-metal (MIM) capacitor | en_US |
| dc.subject | sputter | en_US |
| dc.subject | voltage coefficient of capacitor (VCC) | en_US |
| dc.title | PVD HfO2 for high-precision MIM capacitor applications | en_US |
| dc.type | Article | en_US |