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整合MBE與MOCVD磊晶技術於三族氮化物高頻功率電晶體磊晶結構之開發(III)
整合MBE與MOCVD磊晶技術於三族氮化物高頻功率電晶體磊晶結構之開發(III)
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Date
2010
Authors
張俊彥
CHANG CHUN-YEN
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Keywords
再成長界面
,
氮化處理
,
氮化鋁鎵
,
分子數磊晶
,
Regrowth Interface
,
nitridation
,
AlGaN/GaN
,
MBE
Citation
URI
https://www.grb.gov.tw/search/planDetail?id=2158511&docId=347364
https://ir.lib.nycu.edu.tw/handle/11536/100763
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