透射式微型偏轉鏡的設計與製作

dc.contributor.author	陸懋宏	en_US
dc.contributor.department	交通大學光電工程研究所	zh_TW
dc.date.accessioned	2014-12-13T10:36:53Z
dc.date.available	2014-12-13T10:36:53Z
dc.date.issued	1999	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC88-2215-E009-009	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=418384&docId=74232	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/94246
dc.language.iso	zh_TW	en_US
dc.subject	活性離子蝕刻	zh_TW
dc.subject	微型偏轉鏡	zh_TW
dc.subject	繞射元件	zh_TW
dc.subject	二元光學	zh_TW
dc.subject	Reactive ion etching (RIE)	en_US
dc.subject	Beam deflection microlens	en_US
dc.subject	Diffraction element	en_US
dc.subject	Binary optics	en_US
dc.title	透射式微型偏轉鏡的設計與製作	zh_TW
dc.title	Design and Fabrication of the Beam Deflection Microlens	en_US
dc.type	Plan	en_US

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