12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---子計畫IV：利用CVD法成長BST薄膜與特性分析(I)
| dc.contributor.author | 曾俊元 | en_US |
| dc.contributor.author | TSEUNG-YUENTSENG | en_US |
| dc.contributor.department | 交通大學電子工程系 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:32:01Z | |
| dc.date.available | 2014-12-13T10:32:01Z | |
| dc.date.issued | 2000 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC89-2212-E009-040 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=718398&docId=134744 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/91308 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | 12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---子計畫IV：利用CVD法成長BST薄膜與特性分析(I) | zh_TW |
| dc.title | Growth and Characterizations of CVD BST Thin Films (I) | en_US |
| dc.type | Plan | en_US |