多層二階紅外光柵的研製

dc.contributor.author	蘇德欽	en_US
dc.contributor.author	SU DER-CHIN	en_US
dc.contributor.department	交通大學光電工程研究所	zh_TW
dc.date.accessioned	2014-12-13T10:36:56Z
dc.date.available	2014-12-13T10:36:56Z
dc.date.issued	1999	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC88-2215-E009-013	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=418392&docId=74234	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/94278
dc.language.iso	zh_TW	en_US
dc.subject	嚴格耦合波理論	zh_TW
dc.subject	光學微影術	zh_TW
dc.subject	多階式光柵	zh_TW
dc.subject	模態理論	zh_TW
dc.subject	薄膜沈積	zh_TW
dc.subject	電漿蝕刻	zh_TW
dc.subject	Rigorous coupled-wave theory	en_US
dc.subject	Optical lithography	en_US
dc.subject	Multilevel grating	en_US
dc.subject	Modal theory	en_US
dc.subject	Thin film deposition	en_US
dc.subject	Plasma etching	en_US
dc.title	多層二階紅外光柵的研製	zh_TW
dc.title	Design and Fabrication of Multilayer-Binary Gratings for Infrared Applications	en_US
dc.type	Plan	en_US

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