Parallel simulation of ion implantation for multi-component targets using Boltzmann transport equation

Abstract

A stepwise Boltzmann transport equation (BTE) simulation using non-uniform energy grid momentum matrix and exact nuclear scattering cross-section is successfully parallelized.to simulate the ion implantation of multi-component targets. Assuming that the interactions of ion with different target atoms are independent, the scattering of ions with different components can be calculated concurrently by different processors. It is developed on CONVEX SPP-1000 and the software environment of parallel virtual machine (PVM) with a master-slave paradigm. A speedup of 3.3 has been obtained for the simulation of As ions implanted into AZ1350 (C6.2H6O1N0.15S0.06) which is composed of five components. In addition, our new scheme gives better agreement with the experimental results for heavy ion implantation than the conventional method using a uniform energy grid and approximated scattering function.