低溫薄膜電晶體之相關薄絕緣層之製備研究

Date

Authors

Keywords

複晶矽 , 薄絕緣層 , 薄膜電晶體 , 化學氣相沈積法 , 低溫快速退火 , 準分子雷射 , Polysilicon , Thin dielectric film , Thin film transistor , Chemical vapor deposition (CVD) , Rapid thermal process , Excimer laser

URI

https://www.grb.gov.tw/search/planDetail?id=542081&docId=99576
https://ir.lib.nycu.edu.tw/handle/11536/98162

Collections

研究計畫;;Research Plans