Advanced metallization for ULSI applications FOREWORD
| dc.citation.epage | 0 | en_US |
| dc.citation.spage | 0 | en_US |
| dc.citation.volume | 58 | en_US |
| dc.citation.woscount | 0 | en_US |
| dc.contributor.author | Nakatsuka, Osamu | en_US |
| dc.contributor.author | Baklanov, Mikhail R. | en_US |
| dc.contributor.author | Zhao, Chao | en_US |
| dc.contributor.author | Chan, Mansun | en_US |
| dc.contributor.author | Leu, Jihperng | en_US |
| dc.contributor.author | Luo, Jun | en_US |
| dc.contributor.author | Qu, Xin-Ping | en_US |
| dc.contributor.author | Saitoh, Takeyasu | en_US |
| dc.contributor.author | Suzuki, Keisuke | en_US |
| dc.contributor.author | Yokogawa, Shinji | en_US |
| dc.contributor.department | 交大名義發表 | zh_TW |
| dc.contributor.department | National Chiao Tung University | en_US |
| dc.date.accessioned | 2019-09-02T07:46:16Z | |
| dc.date.available | 2019-09-02T07:46:16Z | |
| dc.date.issued | 2019-07-01 | en_US |
| dc.identifier.doi | 10.7567/1347-4065/ab2533 | en_US |
| dc.identifier.issn | 0021-4922 | en_US |
| dc.identifier.journal | JAPANESE JOURNAL OF APPLIED PHYSICS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.7567/1347-4065/ab2533 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/152657 | |
| dc.identifier.wosnumber | WOS:000476921500001 | en_US |
| dc.language.iso | en_US | en_US |
| dc.title | Advanced metallization for ULSI applications FOREWORD | en_US |
| dc.type | Article | en_US |
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