SIMULATION AND FABRICATION OF A NEW PHASE-SHIFTING MASK FOR 0.35 MU-M CONTACT HOLE PATTERN TRANSFER - HALF-TONE-RIM

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A1994BZ89N00038.pdf (411.2 KB)

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DOI

10.1117/12.167280

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http://dx.doi.org/10.1117/12.167280
https://ir.lib.nycu.edu.tw/handle/11536/20163

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會議論文;;Conferences Paper