子計畫IV：超高真空化學氣相沈積低溫複晶矽薄膜電晶體之鈍化與可靠度的研究

dc.contributor.author	詹世雄	en_US
dc.contributor.department	國立交通大學毫微米實驗室	zh_TW
dc.date.accessioned	2014-12-13T10:36:47Z
dc.date.available	2014-12-13T10:36:47Z
dc.date.issued	1999	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC88-2215-E317-010	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=444393&docId=80487	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/94168
dc.language.iso	zh_TW	en_US
dc.subject	複晶矽	zh_TW
dc.subject	薄膜電晶體	zh_TW
dc.subject	鈍化	zh_TW
dc.subject	可靠度	zh_TW
dc.subject	Polysilicon	en_US
dc.subject	Thin film transistor	en_US
dc.subject	Passivation	en_US
dc.subject	Reliability	en_US
dc.title	子計畫IV：超高真空化學氣相沈積低溫複晶矽薄膜電晶體之鈍化與可靠度的研究	zh_TW
dc.type	Plan	en_US

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