SONOS memories with embedded silicon nanocrystals in nitride
| dc.citation.epage | en_US | |
| dc.citation.issue | 7 | en_US |
| dc.citation.volume | 23 | en_US |
| dc.citation.woscount | 2 | |
| dc.contributor.author | Liu, Mei-Chun | en_US |
| dc.contributor.author | Chiang, Tsung-Yu | en_US |
| dc.contributor.author | Kuo, Po-Yi | en_US |
| dc.contributor.author | Chou, Ming-Hong | en_US |
| dc.contributor.author | Wu, Yi-Hong | en_US |
| dc.contributor.author | You, Hsin-Chiang | en_US |
| dc.contributor.author | Cheng, Ching-Hwa | en_US |
| dc.contributor.author | Liu, Sheng-Hsien | en_US |
| dc.contributor.author | Yang, Wen-Luh | en_US |
| dc.contributor.author | Lei, Tan-Fu | en_US |
| dc.contributor.author | Chao, Tien-Sheng | en_US |
| dc.contributor.department | 電子物理學系 | zh_TW |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Department of Electrophysics | en_US |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.date.accessioned | 2014-12-08T15:11:17Z | |
| dc.date.available | 2014-12-08T15:11:17Z | |
| dc.date.issued | 2008-07-01 | en_US |
| dc.description.abstract | We have successfully demonstrated SONOS memories with embedded Si-NCs in silicon nitride. This new structure exhibits excellent characteristics in terms of larger memory windows and longer retention time compared to control devices. Using the same thickness 2.5 nm of the bottom tunneling oxide, we found that N(2)O is better than O(2) oxide. Retention property is improved when the thickness of N(2)O is increased to 3.0 nm. | en_US |
| dc.identifier.doi | 10.1088/0268-1242/23/7/075033 | en_US |
| dc.identifier.issn | 0268-1242 | en_US |
| dc.identifier.journal | SEMICONDUCTOR SCIENCE AND TECHNOLOGY | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1088/0268-1242/23/7/075033 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/8659 | |
| dc.identifier.wosnumber | WOS:000257201100034 | |
| dc.language.iso | en_US | en_US |
| dc.title | SONOS memories with embedded silicon nanocrystals in nitride | en_US |
| dc.type | Article | en_US |