A comprehensive study on the FIBL of nanoscale MOSFETs

dc.citation.epage1735en_US
dc.citation.issue10en_US
dc.citation.spage1733en_US
dc.citation.volume51en_US
dc.citation.woscount17
dc.contributor.authorTsui, BYen_US
dc.contributor.authorChin, LFen_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.date.accessioned2014-12-08T15:38:30Z
dc.date.available2014-12-08T15:38:30Z
dc.date.issued2004-10-01en_US
dc.description.abstractFringing-induced barrier lowering (FIBL) effect on nanoscale MOSFET is comprehensively examined. It is observed that by combining stack gate dielectric, conductive spacer, short sidewall spacer, and minimum gate/drain (G/D) overlap, the I-off with a dielectric constant of (k) 100 is only 1.6 times higher than that with k = 3.9 when the gate length is 25 run. The fully depleted silicon-on-insulator device shows even better FIBL immunity. It is concluded that although the FIBL effect can not be eliminated, it would not an issue beyond the 45-nm technology node.en_US
dc.identifier.doi10.1109/TED.2004.835022en_US
dc.identifier.issn0018-9383en_US
dc.identifier.journalIEEE TRANSACTIONS ON ELECTRON DEVICESen_US
dc.identifier.urihttp://dx.doi.org/10.1109/TED.2004.835022en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/26353
dc.identifier.wosnumberWOS:000224104700027
dc.language.isoen_USen_US
dc.subjectfringing-induced barrier lowering (FIBL)en_US
dc.subjecthigh dielectric constant materialen_US
dc.subjectMOSFETen_US
dc.subjectsilicon-on-insulator (SOI)en_US
dc.subjectstack gate dielectricen_US
dc.titleA comprehensive study on the FIBL of nanoscale MOSFETsen_US
dc.typeArticleen_US

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