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Monolithic Low Noise and Low Zero-g Offset CMOS/MEMS Accelerometer Readout Scheme

dc.citation.volume9en_US
dc.citation.woscount1en_US
dc.contributor.authorLiu, Yu-Sianen_US
dc.contributor.authorWen, Kuei-Annen_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.date.accessioned2019-04-02T06:01:00Z
dc.date.available2019-04-02T06:01:00Z
dc.date.issued2018-12-01en_US
dc.description.abstractA monolithic low noise and low zero-g offset CMOS/MEMS accelerometer and readout scheme in standard 0.18 m CMOS mixed signal UMC process is presented. The low noise chopper architecture and telescopic topology is developed to achieve low noise. The experiments show noise floor is 421.70 g/Hz. The whole system has 470 mV/g sensitivity. The power consumption is about 1.67 mW. The zero-g trimming circuit reduces the offset from 1242.63 mg to 2.30 mg.en_US
dc.identifier.doi10.3390/mi9120637en_US
dc.identifier.issn2072-666Xen_US
dc.identifier.journalMICROMACHINESen_US
dc.identifier.urihttp://dx.doi.org/10.3390/mi9120637en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/148681
dc.identifier.wosnumberWOS:000455072800028en_US
dc.language.isoen_USen_US
dc.subjectAccelerometer readouten_US
dc.subjectlow noiseen_US
dc.subjectlow zero-g offseten_US
dc.titleMonolithic Low Noise and Low Zero-g Offset CMOS/MEMS Accelerometer Readout Schemeen_US
dc.typeArticleen_US

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