Characteristics of Pb(Zr0.53Ti0.47)O-3 on metal and Al2O3/Si substrates
| dc.citation.epage | F206 | en_US |
| dc.citation.issue | 11 | en_US |
| dc.citation.spage | F203 | en_US |
| dc.citation.volume | 148 | en_US |
| dc.citation.woscount | 8 | |
| dc.contributor.author | Sun, CL | en_US |
| dc.contributor.author | Chen, SY | en_US |
| dc.contributor.author | Yang, MY | en_US |
| dc.contributor.author | Chin, A | en_US |
| dc.contributor.department | 材料科學與工程學系 | zh_TW |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Department of Materials Science and Engineering | en_US |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.date.accessioned | 2014-12-08T15:43:18Z | |
| dc.date.available | 2014-12-08T15:43:18Z | |
| dc.date.issued | 2001-11-01 | en_US |
| dc.description.abstract | We have fabricated Pb(Zr0.53Ti0.47)O-3 on Pt and Pb(Zr0.53Ti0.47)O-3 on 4 nm Al2O3/Si substrates. Although Pb(Zr0.53Ti0.47)O-3 on Pt has a larger dielectric constant and grain size than those on Al2O3/Si, the Pb(Zr0.53Ti0.47)O-3 thin films on both substrates show good capacitance-voltage characteristics and the same threshold voltage shift of similar to3.6 V. Moreover, the leakage current density of Pb(Zr0.53Ti0.47)O-3 on Al2O3/Si at -10 V is nearly three orders of magnitude lower than that of Pb(Zr0.53Ti0.47)O-3 on Pt. The comparable memory characteristics and the lower leakage current of Pb(Zr0.53Ti0.47)O-3 on Al2O3/Si are important for continuous scaling down the ferroelectric memory. (C) 2001 The Electrochemical Society. | en_US |
| dc.identifier.doi | 10.1149/1.1409398 | en_US |
| dc.identifier.issn | 0013-4651 | en_US |
| dc.identifier.journal | JOURNAL OF THE ELECTROCHEMICAL SOCIETY | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1149/1.1409398 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/29306 | |
| dc.identifier.wosnumber | WOS:000171653100037 | |
| dc.language.iso | en_US | en_US |
| dc.title | Characteristics of Pb(Zr0.53Ti0.47)O-3 on metal and Al2O3/Si substrates | en_US |
| dc.type | Article | en_US |