High-Performance Poly-Si Thin-Film Transistors With L-Fin Channels

Abstract

For the first time, we construct poly-Si thin-film transistors (TFTs) with novel L-shaped poly-Si fin channels (poly-Si TFTs with L-fin channels, called LFin-TFTs). The L-fin channels of LFin-TFTs are similar to the multiple-gated fin channels of FinFETs. The LFin-TFTs exhibit a low supply gate voltage (3 V), a good subthreshold swing (SS) similar to 190 mV/dec, and a high on/off current ratio (I-ON/I-OFF) > 10(6) (V-D = 1 V) without hydrogen-related plasma treatments. After Ni salicidation, the devices exhibit steep SS similar to 148 mV/dec and I-ON/I-OFF similar to 10(7). After NH3 plasma treatment, the characteristics of the devices are further improved. The LFin-TFTs have steeper SS similar to 132 mV/dec, higher I-ON/I-OFF > 10(7), and threshold voltage (V-TH) similar to 0.036 V.