Structural and nanoindentation studies of epitaxial titanium oxynitride (001) films grown on MgO(001) substrate
| dc.citation.epage | 6 | en_US |
| dc.citation.issue | en_US | |
| dc.citation.spage | 1 | en_US |
| dc.citation.volume | 251 | en_US |
| dc.citation.woscount | 0 | |
| dc.contributor.author | Do, Hien | en_US |
| dc.contributor.author | Van-Truong Dai | en_US |
| dc.contributor.author | Tian, Jr-Sheng | en_US |
| dc.contributor.author | Yen, Tzu-Chun | en_US |
| dc.contributor.author | Chang, Li | en_US |
| dc.contributor.department | 材料科學與工程學系 | zh_TW |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Department of Materials Science and Engineering | en_US |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.date.accessioned | 2014-12-08T15:36:17Z | |
| dc.date.available | 2014-12-08T15:36:17Z | |
| dc.date.issued | 2014-07-25 | en_US |
| dc.description.abstract | We investigate the effect of chemical composition and residual stress on the mechanical properties of high-quality epitaxial TiNxOy films deposited on MgO(001) substrates by using nanoindentation. The lattice parameters and residual strain/stress of TiNxOy films decrease as oxygen concentration increases. Hardness and Young\'s modulus determined by nanoindentation are about 17-26 GPa and 355-430 GPa, respectively, which vary with chemical composition and residual stress. (C) 2014 Elsevier B.V. All rights reserved. | en_US |
| dc.identifier.doi | 10.1016/j.surfcoat.2014.03.058 | en_US |
| dc.identifier.issn | 0257-8972 | en_US |
| dc.identifier.journal | SURFACE & COATINGS TECHNOLOGY | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1016/j.surfcoat.2014.03.058 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/24608 | |
| dc.identifier.wosnumber | WOS:000337992100001 | |
| dc.language.iso | en_US | en_US |
| dc.subject | Epitaxial titanium oxynitride | en_US |
| dc.subject | Nanoindentation | en_US |
| dc.subject | Mechanical properties | en_US |
| dc.title | Structural and nanoindentation studies of epitaxial titanium oxynitride (001) films grown on MgO(001) substrate | en_US |
| dc.type | Article | en_US |