極大型積體電路元件相關耐火金屬化物及電介質技術

dc.contributor.author	張國明	en_US
dc.contributor.author	CHANG KOW-MING	en_US
dc.contributor.department	國立交通大學電子工程學系	zh_TW
dc.date.accessioned	2014-12-13T10:38:51Z
dc.date.available	2014-12-13T10:38:51Z
dc.date.issued	1996	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC85-2215-E009-061	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=234690&docId=43085	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/95802
dc.language.iso	zh_TW	en_US
dc.subject	極大型積體電路	zh_TW
dc.subject	縱橫比	zh_TW
dc.subject	電子迴旋共振化學氣相沈積	zh_TW
dc.subject	鎢化學氣相沈積	zh_TW
dc.subject	VLSI	en_US
dc.subject	Aspect ratio	en_US
dc.subject	ECR-CVD	en_US
dc.subject	CVD-W	en_US
dc.title	極大型積體電路元件相關耐火金屬化物及電介質技術	zh_TW
dc.title	ULSI Devices Related Refractory Metals and Dielectrics Technologies	en_US
dc.type	Plan	en_US

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