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The growth mechanisms of graphene directly on sapphire substrates by using the chemical vapor deposition

dc.citation.epageen_US
dc.citation.issue22en_US
dc.citation.volume115en_US
dc.citation.woscount1
dc.contributor.authorLin, Meng-Yuen_US
dc.contributor.authorSu, Chen-Fungen_US
dc.contributor.authorLee, Si-Chenen_US
dc.contributor.authorLin, Shih-Yenen_US
dc.contributor.department光電工程學系zh_TW
dc.contributor.departmentDepartment of Photonicsen_US
dc.date.accessioned2014-12-08T15:36:18Z
dc.date.available2014-12-08T15:36:18Z
dc.date.issued2014-06-14en_US
dc.description.abstractUniform and large-area graphene films grown directly on sapphire substrates by using a low-pressure chemical vapor deposition system are demonstrated in this paper. The evolution process and the similar Raman spectra of the samples with different growth durations have confirmed that the continuous graphene film is formed by graphene flakes with similar sizes. The layer-by-layer growth mechanism of this approach is attributed to the preferential graphene deposition on sapphire surfaces. The etching effect of H-2 gas is demonstrated to be advantageous for the larger graphene grain formation. The smooth surface of substrates is also proved to be a key parameter for continuous graphene film formation with better crystalline quality. (C) 2014 AIP Publishing LLC.en_US
dc.identifier.doi10.1063/1.4883359en_US
dc.identifier.issn0021-8979en_US
dc.identifier.journalJOURNAL OF APPLIED PHYSICSen_US
dc.identifier.urihttp://dx.doi.org/10.1063/1.4883359en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/24643
dc.identifier.wosnumberWOS:000337891800018
dc.language.isoen_USen_US
dc.titleThe growth mechanisms of graphene directly on sapphire substrates by using the chemical vapor depositionen_US
dc.typeArticleen_US

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