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Analytical solutions of the azimuthal deviation of a polarizer and an analyzer by polarizer-sample-analyzer ellipsometry

dc.citation.epage3939en_US
dc.citation.issue17en_US
dc.citation.spage3935en_US
dc.citation.volume45en_US
dc.citation.woscount9
dc.contributor.authorChao, YFen_US
dc.contributor.authorLee, KYen_US
dc.contributor.authorLin, YDen_US
dc.contributor.department光電工程學系zh_TW
dc.contributor.departmentDepartment of Photonicsen_US
dc.date.accessioned2014-12-08T15:16:25Z
dc.date.available2014-12-08T15:16:25Z
dc.date.issued2006-06-10en_US
dc.description.abstractThe analytical solutions of the azimuthal deviation of a polarizer and an analyzer were obtained by polarizer-sample-analyzer ellipsometry with a three-intensity measurement technique. By performing two sets of this three-intensity measurement with the polarizer's azimuth set at 45 degrees and at -45 degrees, we were able to obtain a set of ellipsometric parameters free from the azimuthal deviations of the polarizer and the analyzer. (c) 2006 Optical Society of America.en_US
dc.identifier.doi10.1364/AO.45.003935en_US
dc.identifier.issn0003-6935en_US
dc.identifier.journalAPPLIED OPTICSen_US
dc.identifier.urihttp://dx.doi.org/10.1364/AO.45.003935en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/12158
dc.identifier.wosnumberWOS:000238199700002
dc.language.isoen_USen_US
dc.titleAnalytical solutions of the azimuthal deviation of a polarizer and an analyzer by polarizer-sample-analyzer ellipsometryen_US
dc.typeArticleen_US

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