Selected area electrophoretic deposition of carbon nanotubes in triode structure for field emission device

Abstract

In this work, carbon nanotubes (CNTs) were deposited in a triode structure by electrophoretic deposition (EPD). Two power supplies were used in order to provide a gate electrode and a cathode electrode with different voltages. Following the electric field distribution, CNTs were forcibly dragged toward the cathode electrode but repelled out of the gate electrode. By this designed voltage-controlling method, CNTs were deposited in the selected area without any photoresist or sacrificial layer.