熱動式撓性微型機構的設計與製作(II)
| dc.contributor.author | 徐文祥 | en_US |
| dc.contributor.author | HSU WENSYANG | en_US |
| dc.contributor.department | 交通大學機械工程系 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:37:47Z | |
| dc.date.available | 2014-12-13T10:37:47Z | |
| dc.date.issued | 1998 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC87-2218-E009-015 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=395592&docId=69862 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/94862 | |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 微機電系統 | zh_TW |
| dc.subject | 微致動器 | zh_TW |
| dc.subject | 表面細微加工 | zh_TW |
| dc.subject | 體微加工 | zh_TW |
| dc.subject | 微型夾子 | zh_TW |
| dc.subject | Micro electromechanical system | en_US |
| dc.subject | Microactuator | en_US |
| dc.subject | Surface micromachining | en_US |
| dc.subject | Bulk micromachining | en_US |
| dc.subject | Microgripper | en_US |
| dc.subject | MEMS | en_US |
| dc.title | 熱動式撓性微型機構的設計與製作(II) | zh_TW |
| dc.title | Design and Fabrication of Thermal-Driven Compliant Micromechanisms (II) | en_US |
| dc.type | Plan | en_US |