Characterization of Si nanorods by spectroscopic ellipsometry with efficient theoretical modeling
| dc.citation.epage | 879 | en_US |
| dc.citation.issue | 4 | en_US |
| dc.citation.spage | 876 | en_US |
| dc.citation.volume | 205 | en_US |
| dc.citation.woscount | 19 | |
| dc.contributor.author | Hsu, Shih-Hsin | en_US |
| dc.contributor.author | Liu, En-Shao | en_US |
| dc.contributor.author | Chang, Yia-Chung | en_US |
| dc.contributor.author | Hilfiker, James N. | en_US |
| dc.contributor.author | Kim, Young Dong | en_US |
| dc.contributor.author | Kim, Tae Jung | en_US |
| dc.contributor.author | Lin, Chun-Jung | en_US |
| dc.contributor.author | Lin, Gong-Ru | en_US |
| dc.contributor.department | 光電工程學系 | zh_TW |
| dc.contributor.department | Department of Photonics | en_US |
| dc.date.accessioned | 2014-12-08T15:12:23Z | |
| dc.date.available | 2014-12-08T15:12:23Z | |
| dc.date.issued | 2008-04-01 | en_US |
| dc.description.abstract | Spectroscopic ellipsometry (SE) is applied to characterize Si columnar nanostructures. By employing effective medium approximation (EMA) theory, Si nanorods are treated as a graded layer with each sub-layer modeled as a mixture of Si and voids with varying porosity fraction. In addition, the rigorous coupled-wave analysis and finite-element Green's function method were used in modeling Si nanorods as a stack of disks with varying diameters and thicknesses, and the calculations are in satisfactory agreement with the measurement results. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. | en_US |
| dc.identifier.doi | 10.1002/pssa.200777832 | en_US |
| dc.identifier.issn | 1862-6300 | en_US |
| dc.identifier.journal | PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1002/pssa.200777832 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/9511 | |
| dc.identifier.wosnumber | WOS:000255702600037 | |
| dc.language.iso | en_US | en_US |
| dc.title | Characterization of Si nanorods by spectroscopic ellipsometry with efficient theoretical modeling | en_US |
| dc.type | Article | en_US |