垂直圓柱容器中向下強制氣流流過一水平加熱晶圓之渦旋流結構與相關熱傳特性研究(I)

dc.contributor.author	林清發	en_US
dc.contributor.author	LIN TSING-FA	en_US
dc.contributor.department	國立交通大學機械工程研究所	zh_TW
dc.date.accessioned	2014-12-13T10:35:44Z
dc.date.available	2014-12-13T10:35:44Z
dc.date.issued	2001	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC90-2212-E009-059	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=645518&docId=121282	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/93566
dc.language.iso	zh_TW	en_US
dc.subject	渦流	zh_TW
dc.subject	晶圓	zh_TW
dc.subject	熱傳遞	zh_TW
dc.subject	垂直圓柱容器	zh_TW
dc.subject	向下強制氣流	zh_TW
dc.subject	Vortex flow	en_US
dc.subject	Wafer	en_US
dc.subject	Heat transfer	en_US
dc.subject	Clindrical chamber	en_US
dc.subject	Downward gas flow	en_US
dc.title	垂直圓柱容器中向下強制氣流流過一水平加熱晶圓之渦旋流結構與相關熱傳特性研究(I)	zh_TW
dc.title	Mixed Convective Vortex Flow Structures and Associated Thermal Characteristics in a Downward Gas Flow over a Heated Wafer in a Cylindrical Chamber (I)	en_US
dc.type	Plan	en_US

Files

Now showing 1 - 1 of 1