Micro actuated grating for multi-beam optical pickups
| dc.citation.epage | 1414 | en_US |
| dc.citation.issue | 4 | en_US |
| dc.citation.spage | 1408 | en_US |
| dc.citation.volume | 15 | en_US |
| dc.citation.woscount | 4 | |
| dc.contributor.author | Lee, Chi-Hung | en_US |
| dc.contributor.author | Chiu, Yi | en_US |
| dc.contributor.author | Shieh, Han-Ping D. | en_US |
| dc.contributor.department | 電控工程研究所 | zh_TW |
| dc.contributor.department | 光電工程學系 | zh_TW |
| dc.contributor.department | Institute of Electrical and Control Engineering | en_US |
| dc.contributor.department | Department of Photonics | en_US |
| dc.date.accessioned | 2014-12-08T15:14:41Z | |
| dc.date.available | 2014-12-08T15:14:41Z | |
| dc.date.issued | 2007-02-19 | en_US |
| dc.description.abstract | A stress-induced curved polysilicon actuator with a grating is achieved for the application of recordable optical pickups, which have been realized on a single silicon chip using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity in each order from the grating were generated while applying a voltage to the actuator. The switching between the single beam and multiple beams can be applied for writing data and reading data in the disc, respectively. (c) 2007 Optical Society of America. | en_US |
| dc.identifier.doi | 10.1364/OE.15.001408 | en_US |
| dc.identifier.issn | 1094-4087 | en_US |
| dc.identifier.journal | OPTICS EXPRESS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1364/OE.15.001408 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/11120 | |
| dc.identifier.wosnumber | WOS:000244682500002 | |
| dc.language.iso | en_US | en_US |
| dc.title | Micro actuated grating for multi-beam optical pickups | en_US |
| dc.type | Article | en_US |