Browsing by Author Cheng, JY

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Showing results 1 to 6 of 6
Issue DateTitleAuthor(s)
1-Apr-1998Characterization of polysilicon oxides thermally grown and deposited on the polished polysilicon filmsLei, TF; Cheng, JY; Shiau, SY; Chao, TS; Lai, CS; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Mar-1996Fabrication of thin film transistors by chemical mechanical polished polycrystalline silicon filmsChang, CY; Lin, HY; Lei, TF; Cheng, JY; Chen, LP; Dai, BT; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Nov-1996Low-temperature and low thermal budget fabrication of polycrystalline silicon thin-film transistorsLin, HY; Chang, CY; Lei, TF; Liu, FM; Yang, WL; Cheng, JY; Tseng, HC; Chen, LP; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Nov-1996Low-temperature and low thermal budget fabrication of polycrystalline silicon thin-film transistorsLin, HY; Chang, CY; Lei, TF; Liu, FM; Yang, WL; Cheng, JY; Tseng, HC; Chen, LP; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-Jan-1997A novel planarization of oxide-filled shallow-trench isolationCheng, JY; Lei, TF; Chao, TS; Yen, DLW; Lin, CJ; 電子工程學系及電子研究所; 奈米中心; Department of Electronics Engineering and Institute of Electronics; Nano Facility Center
1-Mar-1997A novel shallow trench isolation techniqueCheng, JY; Lei, TF; Chao, TS; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics