瀏覽 的方式: 關鍵字 RTP processor
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| 公開日期 | 標題 | 作者 |
|---|---|---|
| 1-七月-2000 | Improvement in wafer temperature uniformity and flow pattern in a lamp heated rapid thermal processor | Yin, CP; Hsiao, CC; Lin, TF; 機械工程學系; Department of Mechanical Engineering |
| 公開日期 | 標題 | 作者 |
|---|---|---|
| 1-七月-2000 | Improvement in wafer temperature uniformity and flow pattern in a lamp heated rapid thermal processor | Yin, CP; Hsiao, CC; Lin, TF; 機械工程學系; Department of Mechanical Engineering |