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Browsing by Subject W plug
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Showing results 1 to 4 of 4
Issue Date
Title
Author(s)
1-May-2002
Effect of silane flowing time on W volcano and plug formation
Chang, HL
;
Juang, FL
;
Kuo, CT
;
交大名義發表
;
National Chiao Tung University
1-Aug-1996
Enhanced metalorganic chemical vapor deposition titanium nitride film fabricated using tetrakis-dimethylamino-titanium for barrier metal application in sub-half-micron technology
Wang, CK
;
Liu, LM
;
Liao, M
;
Cheng, HC
;
Lin, MS
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-Aug-1996
Enhanced metalorganic chemical vapor deposition titanium nitride film fabricated using tetrakis-dimethylamino-titanium for barrier metal application in sub-half-micron technology
Wang, CK
;
Liu, LM
;
Liao, M
;
Cheng, HC
;
Lin, MS
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-Aug-2002
Integrated tungsten chemical mechanical polishing process characterization for via plug interconnection in ultralarge scale integrated circuits
Wang, CK
;
Wu, HS
;
Ou, NT
;
Cheng, HC
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
