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Showing results 1 to 17 of 17
Issue DateTitleAuthor(s)
2013Comparison of H-2 and NH3 Treatments for Copper InterconnectsChang, Yu-Min; Leu, Jihperng; Lin, Bing-Hong; Wang, Ying-Lung; Cheng, Yi-Lung; 材料科學與工程學系; Department of Materials Science and Engineering
2011Effect of Annealing on the Microstructure and Electrical Property of RuN Thin FilmsWu, Chia-Yang; Lee, Wen-Hsi; Chang, Shih-Chieh; Cheng, Yi-Lung; Wang, Ying-Lang; 照明與能源光電研究所; Institute of Lighting and Energy Photonics
1-Mar-2012Effect of Electric Potential and Mechanical Force on Copper Electro-Chemical Mechanical PlanarizationChen, Sheng-Wen; Kung, Te-Ming; Liu, Chuan-Pu; Chang, Shih-Chieh; Cheng, Yi-Lung; Wang, Ying-Lang; 照明與能源光電研究所; Institute of Lighting and Energy Photonics
1-May-2010Effect of fluorine flow and deposition temperature on physical characteristics and stability of fluorine-doped siloxane-based low-dielectric-constant materialCheng, Yi-Lung; Wu, Jiung; Chiu, Tai-Jung; 材料科學與工程學系; Department of Materials Science and Engineering
1-Jan-2013Effect of Moisture on Electrical and Reliability Characteristics for Dense and Porous Low-k DielectricsCheng, Yi-Lung; Huang, Jun-Fu; Chang, Wei-Yuan; Chang, Yu-Min; Leu, Jihperng; 材料科學與工程學系; Department of Materials Science and Engineering
1-Feb-2014Effect of moisture on electrical properties and reliability of low dielectric constant materialsCheng, Yi-Lung; Leon, Ka-Wai; Huang, Jun-Fu; Chang, Wei-Yuan; Chang, Yu-Min; Leu, Jihperng; 材料科學與工程學系; Department of Materials Science and Engineering
31-May-2011Effect of N(2)/H(2) plasma treatment on the moisture adsorption of MOCVD-TiN filmsHuang, J. K.; Huang, Cheng-Liang; Chang, Shih-Chieh; Cheng, Yi-Lung; Wang, Ying-Lang; 照明與能源光電研究所; Institute of Lighting and Energy Photonics
31-May-2011Effect of N-2/H-2 plasma treatment on the moisture adsorption of MOCVD-TiN filmsHuang, J. K.; Huang, Cheng-Liang; Chang, Shih-Chieh; Cheng, Yi-Lung; Wang, Ying-Lang; 照明與能源光電研究所; Institute of Lighting and Energy Photonics
1-May-2014Effect of NH3/N-2 ratio in plasma treatment on porous low dielectric constant SiCOH materialsHuang, Jun-Fu; Bo, Tain-Cih; Chang, Wei-Yuan; Chang, Yu-Min; Leu, Jihperng; Cheng, Yi-Lung; 材料科學與工程學系; Department of Materials Science and Engineering
15-Jan-2013Effect of thermal treatment on physical, electrical properties and reliability of porogen-containing and porogen-free ultralow-k dielectricsChang, Yu-Min; Chang, Wei-Yuan; Huang, Jun-Fu; Leu, Jihperng; Cheng, Yi-Lung; 材料科學與工程學系; Department of Materials Science and Engineering
1-Nov-2014Effect of UV curing time on physical and electrical properties and reliability of low dielectric constant materialsKao, Kai-Chieh; Chang, Wei-Yuan; Chang, Yu-Min; Leu, Jihperng; Cheng, Yi-Lung; 材料科學與工程學系; Department of Materials Science and Engineering
1-Apr-2011Enhancement of the Thermal Stability of TiN(x) Capping Layer on the Nickel SilicidesWu, Chi-Ting; Lee, Wen-Hsi; Chang, Shih-Chieh; Cheng, Yi-Lung; Wang, Ying-Lang; 照明與能源光電研究所; Institute of Lighting and Energy Photonics
1-Apr-2011Enhancement of the Thermal Stability of TiNx Capping Layer on the Nickel SilicidesWu, Chi-Ting; Lee, Wen-Hsi; Chang, Shih-Chieh; Cheng, Yi-Lung; Wang, Ying-Lang; 照明與能源光電研究所; Institute of Lighting and Energy Photonics
1-Oct-2013Impact of plasma treatment on structure and electrical properties of porous low dielectric constant SiCOH materialCheng, Yi-Lung; Huang, Jun-Fu; Chang, Yu-Min; Leu, Jihperng; 材料科學與工程學系; Department of Materials Science and Engineering
1-Sep-2013The influence of abrasive particle size in copper chemical mechanical planarizationWei, Kuo-Hsiu; Wang, Yu-Sheng; Liu, Chuan-Pu; Chen, Kei-Wei; Wang, Ying-Lang; Cheng, Yi-Lung; 光電學院; College of Photonics
1-Jan-2011Pulsed Electrodeposition of CuInSe(2) Thin Films onto Mo-Glass SubstratesHu, Shao-Yu; Lee, Wen-Hsi; Chang, Shih-Chieh; Cheng, Yi-Lung; Wang, Ying-Lang; 照明與能源光電研究所; Institute of Lighting and Energy Photonics
1-Jan-2011Pulsed Electrodeposition of CuInSe2 Thin Films onto Mo-Glass SubstratesHu, Shao-Yu; Lee, Wen-Hsi; Chang, Shih-Chieh; Cheng, Yi-Lung; Wang, Ying-Lang; 照明與能源光電研究所; Institute of Lighting and Energy Photonics
Showing results 1 to 17 of 17