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公開日期標題作者
1-八月-2001Expanding the process window and reducing the optical proximity effect by post-exposure delayKu, CY; Shieh, JM; Chiou, TB; Lin, HK; Lei, TF; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-六月-2001Focus measurement with a simple pattern designKu, CY; Lei, TF; Lin, HK; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-九月-2001Monitoring lithographic focus and tilting performance by off-line overlay measurement toolsKu, CY; Lei, TF; Cheng, DS; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
2000New overlay pattern design for real-time focus and tilt monitorKu, CY; Lei, TF; Shieh, JM; Chiou, TB; Lin, HK; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
1-五月-2001Optimal processor mapping for linear-complement communication on hypercubesHou, Y; Wang, CM; Ku, CY; Hsu, LH; 資訊工程學系; Department of Computer Science
1-九月-2003Ping-pong flow control for ATM ABR trafficKu, CY; Hwang, LC; Wu, HT; 電信工程研究所; Institute of Communications Engineering
1-十月-2000Postexposure delay effect on linewidth variation in base added chemically amplified resistKu, CY; Shieh, JM; Chiou, TB; Lin, HK; Lei, TF; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
2000Real-time process control to prevent CD variation induced by post exposure delayKu, CY; Lei, TF; Shieh, JM; Chiou, TB; Chen, YC; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics