科技廠房及設備耐震評估與防震研究---子計畫：廠房結構損傷探測及設備防震技術之研發(I)

Abstract

科技產業在我國經濟發展上佔相當之比重，惟國內科技廠房飽受地震危害之 苦，徒增其營運風險。有鑑於此，本計畫擬以三年的時間，分別針對科技廠房結 構及易損設備，發展結構損傷探測及設備防震﹙振﹚技術，包括：「科技廠房結構 損傷探測技術」、「振動敏感設備防震技術」及「高架地板減振技術」等三個研究 課題，以協助國內科技業者強化震﹙振﹚害防制能力。科技廠房結構損傷探測技 術方面，本計劃擬結合系統識別與結構損傷探測技術，利用結構地震反應監測資 料，在地震發生後，由結構之全域反應快速定位出可能之局部損傷，作為結構安 全評估之依據。經由理論分析、振動台試驗及廠房應用示範計畫，驗證其可行性。 振動敏感設備防震技術方面，本計劃將針對科技廠房黃光區的檢測機台，研發適 用之抗震裝置。根據先前入廠現勘調查結果，以及廠方提供之若干組黃光區敏感 性機台，提出耐震補強方案，進行試做，在真實地震﹙震度三級以上﹚下觀察其 耐震表現，以驗證其可行性，或作為設計改善之依據。高架地板減振技術方面， 本計劃將監測廠方AGV/RGV 運行引致高架地板之振動，針對其振動特性及現場 條件，發展適用之減振措施。

High-tech industries hold a considerable share in the economic development of our country. In view of that the domestic industries have been suffering from seismic hazards posing additional risks in running their business, a three-year project is proposed to develop technology on structural health monitoring and earthquake protection of fab structures and vulnerable facilities. The main subjects include development of: Damage Localization Technique for Fab Structures, Earthquake Protective Technique for Vibration-sensitive Facilities, and Vibration Mitigation Technique for Elevated Floors, meant to help the industries strengthen the earthquake-resistant/ vibration-proof capability. The proposed damage localization technique integrates system identification with the method of damage locating vectors (DLV) to quickly identify local damages, if any, from global responses measured during earthquake scenarios. This serves as a basis for safety assessment of fab structures. Feasibility of the proposed scheme is to be verified thru theoretical analysis, shaking table tests and an in-situ demonstration project. In earthquake protection of manufacturing facilities, some earthquake-resistant devices for a certain types of vibration-sensitive inspection tools will be proposed based on results of the walk-down inspections in the cleanroom and information provided by the vendors. Feasibility of the proposed devices are to be verified upon in-situ implementation with real earthquakes of intensity above Grade III. The devices might be further improved in accordance with the observed seismic performances. In mitigation of the AGV/RGV-induced vibration of the elevated floors, some vibration-proof strategies will be proposed based on the dynamic characteristics and local conditions.