標題: | A broadband and scalable on-chip inductor model appropriate for operation modes of varying substrate resistivities |
作者: | Guo, Jyh-Chyurn Tan, Teng-Yang 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
關鍵字: | broadband;eddy current;inductor;scalable;substrate resistivity |
公開日期: | 1-Nov-2007 |
摘要: | A broadband and scalable model is developed to accurately simulate on-chip inductors with various dimensions and substrate resistivities. The broadband accuracy is proven over frequencies of up to 20 GHz, even beyond resonance. A new scheme of resistance-inductance-capacitance networks is deployed for the spiral coils and substrate to account for 3-D eddy current, substrate return path, and spiral coil to substrate coupling effects. The 3-D eddy current is identified as the key element essential to accurately simulate the broadband characteristics. Electromagnetic simulation using the Advanced Design System momentum is conducted to predict the on-chip inductor performance corresponding to a wide range of substrate resistivities (rho(Si) = 0.05 - 1 k ohm center dot cm). Three operation modes such as transverse electromagnetic mode, slow-wave mode, and eddy current mode are reproduced. The model parameters manifest themselves as physics-based through relevant correlation with psi over three operation modes. The onset of slow-wave mode can be consistently explained by a key element R-p introduced in our model, which accounts for the conductor loss due to an eddy current arising from magnetic field coupling through a substrate return path. This broadband and scalable model is useful for radio frequency circuit simulation. In addition, it can facilitate an optimum design of on-chip inductors through the physics-based model parameters relevant to varying substrate resistivities. |
URI: | http://dx.doi.org/10.1109/TED.2007.907186 http://hdl.handle.net/11536/10144 |
ISSN: | 0018-9383 |
DOI: | 10.1109/TED.2007.907186 |
期刊: | IEEE TRANSACTIONS ON ELECTRON DEVICES |
Volume: | 54 |
Issue: | 11 |
起始頁: | 3018 |
結束頁: | 3029 |
Appears in Collections: | Articles |
Files in This Item:
If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.