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dc.contributor.author曾俊元en_US
dc.contributor.author王聖裕en_US
dc.contributor.author蔡承翰en_US
dc.date.accessioned2014-12-16T06:12:18Z-
dc.date.available2014-12-16T06:12:18Z-
dc.date.issued2011-07-16en_US
dc.identifier.govdocH01L027/24zh_TW
dc.identifier.govdocH01L045/00zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/103568-
dc.description.abstract本發明提供一種電阻式隨存記憶體之製作方法,包含:(a)於一基材上形成一第一電極;(b)於該第一電極上以一175℃至225℃的製程溫度形成一氧化鋯之可變電阻層;及(c)於該可變電阻層上形成一Ti的第二電極。zh_TW
dc.language.isozh_TWen_US
dc.title電阻式隨存記憶體之製作方法zh_TW
dc.typePatentsen_US
dc.citation.patentcountryTWNzh_TW
dc.citation.patentnumber201125114zh_TW
Appears in Collections:Patents


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