Method for removing germanium suboxide

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DC 欄位	值	語言
dc.contributor.author	Liu Po-Tsun	en_US
dc.contributor.author	Huang Chen-Shuo	en_US
dc.date.accessioned	2014-12-16T06:13:52Z	-
dc.date.available	2014-12-16T06:13:52Z	-
dc.date.issued	2014-04-08	en_US
dc.identifier.govdoc	H01L021/335	zh_TW
dc.identifier.govdoc	H01L021/8232	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/104393	-
dc.description.abstract	A method for removing germanium suboxide between a germanium (Ge) substrate and a dielectric layer made of metal oxide includes causing a supercritical fluid composition that includes a supercritical carbon dioxide fluid and an oxidant to diffuse into the germanium suboxide such that metal residues in the dielectric layer, the germanium suboxide and the oxidant are subjected to a redox reaction so as to reduce the germanium suboxide into germanium.	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	Method for removing germanium suboxide	zh_TW
dc.type	Patents	en_US
dc.citation.patentcountry	USA	zh_TW
dc.citation.patentnumber	08691636	zh_TW
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