Method of forming thin-film structure by oblique-angle deposition

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	Chang Chia-Hua	en_US
dc.contributor.author	Yang Chin-Sheng	en_US
dc.contributor.author	Chiu Ching-Hua	en_US
dc.contributor.author	Yu Pei-Chen	en_US
dc.contributor.author	Kuo Hao-Chung	en_US
dc.date.accessioned	2014-12-16T06:14:18Z	-
dc.date.available	2014-12-16T06:14:18Z	-
dc.date.issued	2011-08-16	en_US
dc.identifier.govdoc	B05D003/00	zh_TW
dc.identifier.govdoc	B05D005/06	zh_TW
dc.identifier.govdoc	B05D003/02	zh_TW
dc.identifier.govdoc	C23C014/14	zh_TW
dc.identifier.govdoc	C23C014/30	zh_TW
dc.identifier.govdoc	H05B007/00	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/104645	-
dc.description.abstract	A method of forming thin-film structure by oblique-angle deposition is provided. The method includes the steps of: evaporating target source in a chamber by an electron beam evaporation system, and introducing process gas into the chamber and adjusting tilt angle of the evaporation substrate and controlling temperature in the chamber during evaporation to form thin-film on a evaporation substrate by oblique-angle deposition, and then annealing the evaporation substrate to form a thin-film having porous nanorod microstructure.	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	Method of forming thin-film structure by oblique-angle deposition	zh_TW
dc.type	Patents	en_US
dc.citation.patentcountry	USA	zh_TW
dc.citation.patentnumber	07998539	zh_TW
顯示於類別：	專利資料

文件中的檔案：

若為 zip 檔案，請下載檔案解壓縮後，用瀏覽器開啟資料夾中的 index.html 瀏覽全文。