標題: Microelectro mechanical system for magneto-optic data storage apparatus
作者: Hsu
Wensyang
Shieh
Han-Ping
Sun
Yi Ting
公開日期: 21-Feb-2006
摘要: The present invention relates to a Microelectro mechanical system structure. More specifically the invention relates to utilize a sacrificial layer to fabricate an air bearing structure, followed by forming an aperture, and reducing the aperture to nano-scale by electroplating. And then, by using of two thick film photoresist films for twice electroplating fabrication, for fabricate metal microcoils having high aspect ratio structure and interconnection metal line, to achieve efficiencies of utilizing area and reducing resistance. Moreover, proceed lithography depends on different portions and exposure dose. Then form a single photoresist film to have a specific dimension and thickness structure, finally, by using reflow process, forming a magneto-optic (MO) pickup head comprises of Supersphere Solid Immersion Lens (SSIL), nano-aperture, microcoils and air bearing by using an integrated fabrication, with advantages such as no high cost device and precise apparatus are required in the process of fabrication, mass production in batch fabrication, without step of assembly, for high-density data storage and rewritable record.
官方說明文件#: H01L021/00
H01L027/14
URI: http://hdl.handle.net/11536/104823
專利國: USA
專利號碼: 07002226
Appears in Collections:Patents


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