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dc.contributor.authorChiouen_US
dc.contributor.authorJin-Chernen_US
dc.contributor.authorLinen_US
dc.contributor.authorYu-Chenen_US
dc.date.accessioned2014-12-16T06:14:40Z-
dc.date.available2014-12-16T06:14:40Z-
dc.date.issued2004-02-03en_US
dc.identifier.govdocH01H047/00zh_TW
dc.identifier.govdocH01H047/14zh_TW
dc.identifier.govdocH01H009/00zh_TW
dc.identifier.govdocH01H051/22zh_TW
dc.identifier.govdocH01H051/30zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/104844-
dc.description.abstractThe present invention relates to a control system for an electrostatically-driven microelectromechanical device, which uses multiple electrodes to control the microelectromechanical device, i.e. the lower driven electrode of a capacitor with known two parallel driven electrodes is cut into a number of small electrodes. By selecting an electrode pattern for a desired electrostatic force, it is capable of altering the non-linearity of the device based on various applications and achieving a characteristic such as a linear driven, digital driven, or ultimately optimal driven manners, which is able to reach high operation accuracy for the existing circuit that only possesses a limited accuracy.zh_TW
dc.language.isozh_TWen_US
dc.titleControl system for an electrostatically-driven microelectromechanical devicezh_TW
dc.typePatentsen_US
dc.citation.patentcountryUSAzh_TW
dc.citation.patentnumber06687112zh_TW
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