Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | CHEN Chih | en_US |
dc.contributor.author | LIN Han-Wen | en_US |
dc.date.accessioned | 2014-12-16T06:14:49Z | - |
dc.date.available | 2014-12-16T06:14:49Z | - |
dc.date.issued | 2014-04-17 | en_US |
dc.identifier.govdoc | H01L021/768 | zh_TW |
dc.identifier.govdoc | H01L023/532 | zh_TW |
dc.identifier.uri | http://hdl.handle.net/11536/104926 | - |
dc.description.abstract | A circuit board with twinned Cu circuit layer and a method for manufacturing the same are disclosed, wherein the method comprises the following steps: (A) providing a substrate with a first circuit layer formed thereon, wherein the first circuit layer comprises a conductive pad; (B) forming a first dielectric layer on the surface of the substrate; (C) forming plural openings in the first dielectric layer, wherein each opening penetrates through the first dielectric layer and communicates with the conductive pad to expose the conductive pad; (D) forming a Cu seeding layer in the openings; (E) forming a nano-twinned Cu layer in the openings with an electroplating process; and (F) annealing the substrate to transfer the material of the Cu seeding layer into nano-twinned Cu, wherein the nano-twinned Cu layer and the transferred Cu seeding layer are formed into a second circuit layer. | zh_TW |
dc.language.iso | zh_TW | en_US |
dc.title | CIRCUIT BOARD WITH TWINNED CU CIRCUIT LAYER AND METHOD FOR MANUFACTURING THE SAME | zh_TW |
dc.type | Patents | en_US |
dc.citation.patentcountry | USA | zh_TW |
dc.citation.patentnumber | 20140103501 | zh_TW |
Appears in Collections: | Patents |
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