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dc.contributor.authorTSAI Chuen-Jinnen_US
dc.contributor.authorCHEN Sheng-Chiehen_US
dc.contributor.authorCHEN Hong-Daren_US
dc.date.accessioned2014-12-16T06:14:51Z-
dc.date.available2014-12-16T06:14:51Z-
dc.date.issued2014-01-30en_US
dc.identifier.govdocB44C001/22zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/104961-
dc.description.abstractA nozzle plate containing multiple micro-orifices for the cascade impactor and a method for manufacturing the same are disclosed. The nozzle plate is formed by a series of semiconductor processes, including lithography, etching and electroplating. The nozzle plate comprises a plate body and a plurality of micro-orifices formed on the plate body. The orifice has a diameter which gradually expands in the direction away from the bottom of the plate body to achieve a smooth inner surface, allowing particles to pass therethrough smoothly without being clogged in the nozzle plate.zh_TW
dc.language.isozh_TWen_US
dc.titleMETHOD FOR MANUFACTURING A NOZZLE PLATE CONTAINING MULTIPLE MICRO-ORIFICES FOR CASCADE IMPACTORzh_TW
dc.typePatentsen_US
dc.citation.patentcountryUSAzh_TW
dc.citation.patentnumber20140027406zh_TW
Appears in Collections:Patents


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