METHOD FOR MANUFACTURING A NOZZLE PLATE CONTAINING MULTIPLE MICRO-ORIFICES FOR CASCADE IMPACTOR

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DC 欄位	值	語言
dc.contributor.author	TSAI Chuen-Jinn	en_US
dc.contributor.author	CHEN Sheng-Chieh	en_US
dc.contributor.author	CHEN Hong-Dar	en_US
dc.date.accessioned	2014-12-16T06:14:51Z	-
dc.date.available	2014-12-16T06:14:51Z	-
dc.date.issued	2014-01-30	en_US
dc.identifier.govdoc	B44C001/22	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/104961	-
dc.description.abstract	A nozzle plate containing multiple micro-orifices for the cascade impactor and a method for manufacturing the same are disclosed. The nozzle plate is formed by a series of semiconductor processes, including lithography, etching and electroplating. The nozzle plate comprises a plate body and a plurality of micro-orifices formed on the plate body. The orifice has a diameter which gradually expands in the direction away from the bottom of the plate body to achieve a smooth inner surface, allowing particles to pass therethrough smoothly without being clogged in the nozzle plate.	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	METHOD FOR MANUFACTURING A NOZZLE PLATE CONTAINING MULTIPLE MICRO-ORIFICES FOR CASCADE IMPACTOR	zh_TW
dc.type	Patents	en_US
dc.citation.patentcountry	USA	zh_TW
dc.citation.patentnumber	20140027406	zh_TW
顯示於類別：	專利資料

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