METHOD FOR REMOVING GERMANIUM SUBOXIDE

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DC Field	Value	Language
dc.contributor.author	Liu Po-Tsun	en_US
dc.contributor.author	Huang Chen-Shuo	en_US
dc.date.accessioned	2014-12-16T06:14:57Z	-
dc.date.available	2014-12-16T06:14:57Z	-
dc.date.issued	2013-07-04	en_US
dc.identifier.govdoc	H01L021/306	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/105023	-
dc.description.abstract	A method for removing germanium suboxide between a germanium (Ge) substrate and a dielectric layer made of metal oxide includes causing a supercritical fluid composition that includes a supercritical carbon dioxide fluid and an oxidant to diffuse into the germanium suboxide such that metal residues in the dielectric layer, the germanium suboxide and the oxidant are subjected to a redox reaction so as to reduce the germanium suboxide into germanium.	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	METHOD FOR REMOVING GERMANIUM SUBOXIDE	zh_TW
dc.type	Patents	en_US
dc.citation.patentcountry	USA	zh_TW
dc.citation.patentnumber	20130171830	zh_TW
Appears in Collections:	Patents

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