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dc.contributor.authorLiu Po-Tsunen_US
dc.contributor.authorHuang Chen-Shuoen_US
dc.date.accessioned2014-12-16T06:14:57Z-
dc.date.available2014-12-16T06:14:57Z-
dc.date.issued2013-07-04en_US
dc.identifier.govdocH01L021/306zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/105023-
dc.description.abstractA method for removing germanium suboxide between a germanium (Ge) substrate and a dielectric layer made of metal oxide includes causing a supercritical fluid composition that includes a supercritical carbon dioxide fluid and an oxidant to diffuse into the germanium suboxide such that metal residues in the dielectric layer, the germanium suboxide and the oxidant are subjected to a redox reaction so as to reduce the germanium suboxide into germanium.zh_TW
dc.language.isozh_TWen_US
dc.titleMETHOD FOR REMOVING GERMANIUM SUBOXIDEzh_TW
dc.typePatentsen_US
dc.citation.patentcountryUSAzh_TW
dc.citation.patentnumber20130171830zh_TW
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