標題: | Apparatus and method for forming multilayer polymer thin film |
作者: | Meng, Hsin-Fei Horng, Sheng-Fu Tseng, Hsin-Rong Tuan, Chi-Shen |
公開日期: | 28-一月-2010 |
摘要: | Apparatus and method for forming multilayer polymer thin film. The method uses a solution container with a gap to prevent the huge amount of solution from directly falling on the first layer. Then the wet film is formed by moving the container with the thin film thickness is decided by the distance between the gap and the substrate. The wet film is dried in a very short time by the heater therefore there is no time for the second solvent to dissolve the first layer. The method can effectively achieve the large-area and multilayer structure in organic devices through solution processing. |
官方說明文件#: | B05D005/12 |
URI: | http://hdl.handle.net/11536/105446 |
專利國: | USA |
專利號碼: | 20100021622 |
顯示於類別: | 專利資料 |