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dc.contributor.authorChao, Ru-Pinen_US
dc.contributor.authorWu, Hsin-Yingen_US
dc.contributor.authorWang, Chih-Chiehen_US
dc.contributor.authorChang, Shao-Juen_US
dc.contributor.authorHwang, Jenn-Changen_US
dc.contributor.authorKou, Chwung-Shanen_US
dc.contributor.authorWu, Kuen-Yien_US
dc.contributor.authorLee, An-Pingen_US
dc.contributor.authorWei, Hsiao-Kuanen_US
dc.date.accessioned2014-12-16T06:15:57Z-
dc.date.available2014-12-16T06:15:57Z-
dc.date.issued2008-06-05en_US
dc.identifier.govdocH05H001/46zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/105596-
dc.description.abstractA device utilizes a plasma for a liquid crystal alignment. The alignment is processed in a vacuum chamber in a simple way. A general chemical vapor deposition is coordinated to reduce cost. The present invention is a novel contactless process avoiding particle contamination, residual static charge and scratch. And multiple are as of the present invention can be used for alignment.zh_TW
dc.language.isozh_TWen_US
dc.titlePlasma device for liquid crystal alignmentzh_TW
dc.typePatentsen_US
dc.citation.patentcountryUSAzh_TW
dc.citation.patentnumber20080129207zh_TW
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