Process for fabricating supersphere solid immersion lens

標題:	Process for fabricating supersphere solid immersion lens
作者:	Hsu, Wensyang Sun, Yi-Ting
公開日期:	8-九月-2005
摘要:	The present invention relates to process for fabricating supersphere solid immersion lens (SSIL). The procedure of the present invention comprises the steps of: firstly, coating a positive photoresist layer on a substrate, followed by first exposure and second exposure with different exposure dose separately by first mask and second mask to form the positive photoresist structure with different dimensions and depths. The first exposure dose is supplied enough to make sure the patterns of the first mask can be observed on the positive photoresist layer during the alignment of the second exposure process. And the following reflow process forms a supersphere solid immersion lens (SSIL) structure.
官方說明文件#:	G02B003/00
URI:	http://hdl.handle.net/11536/105729
專利國:	USA
專利號碼:	20050196708
顯示於類別：	專利資料

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APA	Hsu, W., & Sun, Y. (2005). Process for fabricating supersphere solid immersion lens. http://hdl.handle.net/11536/105729.
Bibtex	@article{Hsu2005Process, title={Process for fabricating supersphere solid immersion lens}, author={Hsu, Wensyang and Sun, Yi-Ting}, journal={http://hdl.handle.net/11536/105729}, year={2005}, url={https://ir.lib.nycu.edu.tw/handle/11536/105729}, }