近場光碟機飛行讀寫頭之設計與製作

Abstract

本研究旨在設計及製作近場光碟機飛行讀寫頭，為了減低各元件製作上的複雜度，並且達到低成本、高生產率及快速加工，本研究採用組裝方式製作讀寫頭，組裝元件共包含飛行滑動片、物鏡、固態浸入透鏡及懸吊臂。滑動片以矽晶圓製作，利用雷射加工、機械拋光及校準治具將固態浸入透鏡精準埋入滑動片中，並以半導體製程製作飛行面結構，懸吊臂部分採用了舊式硬碟機的設計做組裝，滑動片最後完成尺寸為2.8mm × 2.2mm × 0.6mm，重量約為6.5mg。其次，本研究中利用Zemax軟體建立光學模型分析物鏡與固態浸入透鏡間的組裝公差，研究中製作的讀寫頭原型，量測到的組裝誤差量分別為0.03°及10μm，比對模擬結果，製程誤差皆在容許的範圍內。最後，利用雷射都卜勒干涉儀量測本研究製作滑動片的飛行高度，並比較有組裝透鏡與無組裝透鏡滑動片間飛行高度的差異。

This study develops an assembly method to fabricate the flying head of near-field optical disk drive. The flying head mechanism consists of a slider, a suspension, and optical lenses including objective lens (OL) and solid immersion lens (SIL). The slider is made of silicon wafers. SIL are precisely and firmly inserted into the slider substrate by laser, polish processes and an alignment jig. Then, the geometric structure of the flying surface that can promote the flying stability is fabricated by using reactive ion etching. After the OL and the suspension are affixed to the slider, the flying head is completed. The complete slider size was 2.8 mm × 2.2 mm × 0.6 mm, and the weight is about 6.5mg. Furthermore, an optical model is established to analyze the related fabrication tolerance between OL and SIL by using a ZEMAX software. Finally, the flying characteristics of different flying surfaces are measured by using a laser Doppler vibrometer, and the experiment results are discussed.