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dc.contributor.author吳正宇en_US
dc.contributor.author金星吾en_US
dc.date.accessioned2014-12-16T06:16:56Z-
dc.date.available2014-12-16T06:16:56Z-
dc.date.issued2009-08-11en_US
dc.identifier.govdocH01J001/02zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/106176-
dc.description.abstract一種尖端增強之微電漿元件,主要是利用微尖端結構具有很強的電場集中效應,乃於陰極板上設置有微尖端電極,可將電場局部集中於微尖端電極上,而易於在陰極板與陽極板間的放電空間中誘發出電漿現象,藉此達到降低電漿崩解電壓的效果。zh_TW
dc.language.isozh_TWen_US
dc.title尖端增強之微電漿元件zh_TW
dc.typePatentsen_US
dc.citation.patentcountryTWNzh_TW
dc.citation.patentnumberI313476zh_TW
Appears in Collections:Patents


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