Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 彭德保 | en_US |
| dc.contributor.author | 周正全 | en_US |
| dc.date.accessioned | 2014-12-16T06:16:59Z | - |
| dc.date.available | 2014-12-16T06:16:59Z | - |
| dc.date.issued | 2008-08-11 | en_US |
| dc.identifier.govdoc | H01L021/66 | zh_TW |
| dc.identifier.govdoc | H01L021/60 | zh_TW |
| dc.identifier.govdoc | G01N021/88 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/106224 | - |
| dc.description.abstract | 本發明係揭露一種檢測系統及方法,用以檢測具有紋理 之一待測加工物,此檢測系統至少包含一架構、一感測器、 複數個發光元件及一控制模組。架構係以弧狀結構環繞待測 加工物,感測器用以產生一影像,發光元件係配置於架構 上,控制模組用以控制一角度及一方位之發光元件之開啓或 關閉,以產生光束照射予待測加工物,並反射至感測器,以 產生影像。 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.title | 檢測系統及方法 | zh_TW |
| dc.type | Patents | en_US |
| dc.citation.patentcountry | TWN | zh_TW |
| dc.citation.patentnumber | I299890 | zh_TW |
| Appears in Collections: | Patents | |
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