Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 林鵬 | en_US |
| dc.contributor.author | 曾俊元 | en_US |
| dc.contributor.author | 帝人杜邦菲林日本股份有限公司 | en_US |
| dc.date.accessioned | 2014-12-16T06:17:25Z | - |
| dc.date.available | 2014-12-16T06:17:25Z | - |
| dc.date.issued | 2004-11-01 | en_US |
| dc.identifier.govdoc | H01L027/02 | zh_TW |
| dc.identifier.govdoc | H01L027/02 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/106420 | - |
| dc.description.abstract | 本案係指一種於低溫下之電晶體鈣鈦礦電容結構及其製造方法，其包含下列步驟：(a)提供一基板；(b)形成一釕薄膜於該基板上；以及(c)再依序形成一第一釕酸鍶鋇電極、一鈣鈦礦電容材料之結構、及一第二釕酸鍶鋇電極結構於該釕薄膜上。 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.title | 一種鈣鈦礦薄膜電容結構及其製造方法 | zh_TW |
| dc.type | Patents | en_US |
| dc.citation.patentcountry | TWN | zh_TW |
| dc.citation.patentnumber | I223433 | zh_TW |
| Appears in Collections: | Patents | |
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