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dc.contributor.author林鵬en_US
dc.contributor.author曾俊元en_US
dc.contributor.author帝人杜邦菲林日本股份有限公司en_US
dc.date.accessioned2014-12-16T06:17:25Z-
dc.date.available2014-12-16T06:17:25Z-
dc.date.issued2004-11-01en_US
dc.identifier.govdocH01L027/02zh_TW
dc.identifier.govdocH01L027/02zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/106420-
dc.description.abstract本案係指一種於低溫下之電晶體鈣鈦礦電容結構及其製造方法,其包含下列步驟:(a)提供一基板;(b)形成一釕薄膜於該基板上;以及(c)再依序形成一第一釕酸鍶鋇電極、一鈣鈦礦電容材料之結構、及一第二釕酸鍶鋇電極結構於該釕薄膜上。zh_TW
dc.language.isozh_TWen_US
dc.title一種鈣鈦礦薄膜電容結構及其製造方法zh_TW
dc.typePatentsen_US
dc.citation.patentcountryTWNzh_TW
dc.citation.patentnumberI223433zh_TW
Appears in Collections:Patents


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